ICP-RIE
PECVD
E-gun Evaporator
RTA Annealing
DUV Mask Aligner
Electron-beam lithography system
Micro-PL system (ARPL)
SEM
focused ion beam
Photoluminescence system
飛躍與世代傳承!經國先生親訪交大雷射實驗室~~~
Coating System with Optical In-situ Monitor